Betapure™ CMP filter cartridges are high capacity depth filters optimized for oxide and metal slurries used in chemical mechanical planarization (CMP) applications. Betapure CMP filters are composed of all-polypropylene components and features a multi-zone "graded-porosity" design for the optimum level of particle classification.
features
Graded porosity design for superior slurry classification
Reduces large particle counts (LPC) that cause equipment damage and decreased yields
All polypropylene depth filter capsules allow for broad chemical and temperature compatibility
Quality manufacturing validated by ISO certified quality management system
Built to exacting specifications to provide consistency and process repeatability
Series
Betapure™ CMP Series
Filter Type
Depth
Overall Length [Min]
20 in
Gasket Material
EPR
Micron Rating
5 μm
Overall Length [Max]
50.8 cm
Filter Material
Polypropylene
Weight
0.0 KG
EAN or UPC
16145041006
We're here for you
with Service Centers across the country - We have your back
Find a Service Center
