3M™ Betapure™ AUL Series Filter Cartridges represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields. Featuring bi-component fiber technology with targeted multizone filtration layers to enable Large Particle Count (LPC) reduction and yield improvement in the most advanced CMP processes.
features
Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
Bi-component fiber technology with targeted multizone filtration layers enable Large Particle Count (LPC) reduction
The rigid filter structure maintains pore size even under intermittent process conditions, providing consistent filtration
Series
Betapure™ AUL Series
Overall Dia.
2.92 in
Gasket Material
EPR
Overall Length [Max]
76.2 cm
Overall Length [Min]
30 in
Filter Material
Polyethylene: Polypropylene Bi-Component Fiber and Glass Fiber
Filter Type
Depth
Micron Rating
0.7 μm
Weight
0.0 KG
EAN or UPC
54007982364
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