3M™ Betapure™ AUL Series Filter Capsules contain 3M™ Betapure AUL filters that represent a new generation in Chemical Mechanical Planarization (CMP) slurry classification providing superior reduction of large particle counts for improved yields.
features
Classification filter designed for Chemical Mechanical Planarization (CMP) slurry classification
Bi-component fiber technology with targeted multizone filtration layers enables Large Particle Count (LPC) reduction
Rigid filter structure maintains pore size even under intermittent process conditions for consistent filtration
Weight
0.0 KG
EAN or UPC
54007982906
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